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A6.( Multi-electrode Neural Recording!!` ! /$:WPI s Nitric Oxide Nanosensor`4     01  2!NO Sensor Calibration`  3"NO Sensor Calibration`  4#Multichannel NO Recordings`   $   0` 33` Sf3f` 33g` f` www3PP` ZXdbmo` \ғ3y`Ӣ` 3f3ff` 3f3FKf` hk]wwwfܹ` ff>>\`Y{ff` R>&- {p_/̴>?" dd@,|?" dd@   " @ ` n?" dd@   @@``PR    @ ` ` p>> VN(    6\7  `} 7 X Click to edit Master title style!!   0x7  ` 7 RClick to edit Master text styles Second level Third level Fourth level Fifth level!    S   07 ^ ` 7 f*b    0h7 ^  7 h*b    07 ^ ` 7 h*b  H  0޽h ? 3380___PPT10. Default Design 0 0(  r  S D_> _ H  0޽h ? 33___PPT10i.Z+D=' N= @B +  0 ( _(   r  S `_ `  _ /  6_P" ? Electrode Electrolyte (neutral charge)N@b c cc 0   0p P0 ^C+, A- in solution 2c  RB  s *D> p   0p@` MC 2c    0lp` 0  MC 2c    0p`  MC 2c    0 p  NA- 2c    0p @ @  NA- 2c    0p p@ LC+ 2b    0\pp  LC+ 2b  RB  s *DPRB  s *D` P`   6 p0  Le-c    6%p` 0  Le-c  RB  @ s *DRB  @ s *D  XB  0Do@ @  0l)p  X Current flow 2 c   $ 0-p x  %C+ : Cation A- : Anion e- : electron &(2&c&   ^ % 0t3p P l zFairly common electrode materials: Pt, Carbon, & , Au, Ag,& Electrode metal is use in conjunction with salt, e.g. Ag-AgCl, Pt-Pt black, or polymer coats (e.g. Nafion, to improve selectivity) g@t  &   X & 0 @ RB ' s *D @ RB ( s *D P H  0޽h ? 33___PPT10i.mo+D=' N= @B +&   0 = 5  ,(  ,r , S >p `  p f , s *A ? ?  , 04p@` gGeneral Ionic Equations (2c   , 0(DpP  <a) If electrode has same material as cation, then this material gets oxidized and enters the electrolyte as a cation and electrons remain at the electrode and flow in the external circuit. 2c@%  C  I ! , 0 JpP P V  ub) If anion can be oxidized at the electrode to form a neutral atom, one or two electrons are given to the electrode.v 2vc v  , 0Op  Pa)(2c    , 0SppP Nb) 2c    , s *Wp` YCurrent flow from electrode to electrolyte : Oxidation (Loss of e-) Current flow from electrolyte to electrode : Reduction (Gain of e-)-c c ck/c c ckc    , 0ap @ <The dominating reaction can be inferred from the following := 2=c = H , 0޽h ? 33___PPT10i.sẑ+D=' N= @B +  0 P i(   r  S Pnp `  p   0lpt -A characteristic potential difference established by the electrode and its surrounding electrolyte which depends on the metal, concentration of ions in solution and temperature (and some second order factors) . *cc    0xp  BHalf cell potential cannot be measured without a second electrode.,CBcc C `  0ܻp^  The half cell potential of the standard hydrogen electrode has been arbitrarily set to zero. Other half cell potentials are expressed as a potential difference with this electrode. 2c    04pp^ 0 TReason for Half Cell Potential : Charge Separation at Interface Oxidation or reduction reactions at the electrode-electrolyte interface lead to a double-charge layer, similar to that which exists along electrically active biological cell membranes.,@cc  H  0޽h ? 33___PPT10i.+D=' N= @B +  0 0N(  0r 0 S p `}  p  0 \Ahalf cell0 p 0 08p0 * FNote: Electrode material is metal + salt or polymer selective membrane"G 2Gg G H 0 0޽h ? 33___PPT10i.{,+D=' N= @B +  0  8](  8r 8 S Hp`   p  8 TA table``  pXB 8@ 0DԔ  8 0|pS `  gStandard Hydrogen electrode 2c  ,  8 0$p  l bNote: Ag-AgCl has low junction potential & it is also very stable -> hence used in ECG electrodes! ccg&   V RB  8 s *D p RB  8@ s *D H 8 0޽h ? 33___PPT10i.| +D=' N= @B +   0   p@! (  @r @ S Xp `}  p 3 @ 0p  If there is a current between the electrode and electrolyte, the observed half cell potential is often altered due to polarization. 2g   Q  @# s"v6   LALAׄLAH柚LȦ1/ LAƩ*6`= pb @ c $X99?"`Q p" @B @HT\I%eo_s16399@ 9 p" @ @H +D=' N= @B +   0  0 T(  Tr T S  `}   I T 0$`   Perfectly Polarizable Electrodes These are electrodes in which no actual charge crosses the electrode-electrolyte interface when a current is applied. The current across the interface is a displacement current and the electrode behaves like a capacitor. Example : Ag/AgCl Electrode Perfectly Non-Polarizable Electrode These are electrodes where current passes freely across the electrode-electrolyte interface, requiring no energy to make the transition. These electrodes see no overpotentials. 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This changes the half cell potential temporarily. 6 2gg    0pP  What If a pair of electrodes is in an electrolyte and one moves with respect to the other, a potential difference appears across the electrodes known as the motion artifact. This is a source of noise and interference in biopotential measurements` 2gggIg&      0<P0 9Motion artifact is minimal for non-polarizable electrodes : 2:g : H  0޽h ? 33___PPT10i. +D=' N= @B +  0 ` u(  x  c $X `}     NAbs   0\ PPjD<4___PPT9 pMetal Plate Electrodes (historic) Suction Electrodes (historic interest) Floating Electrodes Flexible Electrodesd5 2 2( 25gg(g q 8XRB  @ s *D@ `  < L ]Electrode metalg    <`  Y Electrolyte g  RB @ s *DP   s *\z [Think of the construction of electrosurgical electrode And, how does electro-surgery work? "\ 2\g \ H  0޽h ? 33___PPT10i.h+D=' N= @B +  0 J(  ~  s *  `}   ~  s *     ^AFig5-9LPp `  `  B p (a) Metal-plate electrode used for application to limbs. (b) Metal-disk electrode applied with surgical tape. (c)Disposable foam-pad electrodes, often used with ECGa  H  0޽h ? ̙33f___PPT10i. 6+D=' N= @B +  0 }(    6x  ` &Commonly Used Biopotential Electrodes''c(&     R  C *AFig5-10Lp    0  !qSuction electrodes No straps or adhesives required precordial (chest) ECG can only be used for short periods Z^- 2c^cg25   2    0d% 1 =Floating electrodes metal disk is recessed swimming in the electrolyte gel not in contact with the skin reduces motion artifact |q- 2cXccg    0&p @ cSuction Electrode"(2g  H  0޽h ? ̙33f___PPT10i. 0%+D=' N= @B +X  0 WW fhW(  4  BCDEXF`u#F{n`ZVV%Z9SGIW8W8a.u! A-0@|4  BCDEXF`F{n`ZVV%Z9SGIW8W8a.u! A-0@|:  3 A O :  3 i+.  :  3 i+. 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B CNDE4F>i+ aMN N CNNMaM @`d &4B " # i+ /4B # # i+ &4B $ # i+4 &5@ % C i+  4@ & C i+/&4R ' *BCkDElFvN 66% 2 25<FPZ dkkk]FWFWWP[F98<@`T ( ,BCkDEhFpi+N 66% 2 25<FPZ dkkk]FWFWWP[F958@@ ) C i+4B * # i+4B + # i+4B , # i+ - 64  sDouble-sided Adhesive-tape ring$ 0 g   . 6p9  fInsulating package$0g   / 6:; n Metal disk4 0 gc   0 6B  }Electrolyte gel in recess40gc   1 6lBV] g(a)40gc   2 6AVz g(b)40gc   3 6H }  g(c)40gc   4 6S) &  Snap coated with Ag-AgCl$0g&    5 6Y! 2  q External snap40 gc   6 6c6   o Plastic cup4 0 gc   7 6b   :  hTack40gc   8 6]: Z   p Plastic disk4 0 gc   9 6m b  lFoam pad4 0gc   : 6`o[ m  sCapillary loops40gc   ; 6w ;  zDead cellular material40gc   < 6d|[ X  uGerminating layer40gc   = 6T U  uGel-coated sponge40gc  4B >@ # hO4B ? # -  @ B<C(DE8FBi+225<!<!!((/// 22 @`8@|` A B<C!DE8FBi+  <<!!!   @`   A4B B #  9 4B C@ # ;4B D # ;4B E #  j 4B F@ #  U 8 D 4B G@ # z < 4B H # z  ! 4B I # c ] 4B J #  4B K #   4B L # u  X  M B%C<DE8FBi+22/22%%"<<622 @`;  w  N B)C<DE8FBi+..5 < <).).... @` n  O B9C/DE8FBi+   %9/9/%   @` ;  P B8C/DE8FBi+   $8/8/%   @` s $  Q B<C2DE8FBi+,,2<<%22%%(,, @`0 - i b  R B<C2DE8FBi+..5<<%22((+ .. @` n   S B(C<DE8FBi+22 ///((!!<!<622 @`I '  T B(C@DE8FBi+22 6@@(/(//22 @` y 4B U #  ` [  V B(C<DE8FBi+//5<<(+(+/// @` L t   W B<C2DE8FBi+   %<2<2$    @`% a  X B/C<DE8FBi+%//%<<   @` O Y B,C<DE8FBi+//2<<,(,("+// @`[#O Z BCDEFi+&& -xKqbgsZ}PCC}5s(bK- xW 9"(5CCPZ"g9qWxxNP@`W= [ BC6DEFi+))(e/36666/q(M/??F Pa$x.5<???)?J<l5.$ TX@`44 \ BkCJDEXF`i+kJk6663,nE E + [[A& & ,366J-0@ 9 . R ] *BCDElFv{{ { {xqqqkgd dddd]W8<@` w . T ^ ,BCDEhFpi+{{ { {xqqqkgd dddd]W58@ w . : _ 3 i+1 [ 4B `@ #   B  a B9C2DE8FBi+,,299%22%%( ,, @`.  `  b 6  &Commonly Used Biopotential Electrodes('&c(`&      d 0ȗP  gFloating Electrodes$(2g  RB e@ s *D 0 RB f s *D` g 0@p`  ZReusable" 2 g   h 0 p   \ Disposable" 2 g  H  0޽h ? ̙33f___PPT10i. >+D=' N= @B +  0 0.(  R  C *AFig5-12L p    6d  54___PPT10 B___PPT9$ (a) Carbon-filled silicone rubber electrode. (b) Flexible thin-film neonatal electrode. (c) Cross-sectional view of the thin-film electrode in (b). Lggg    Bh  `}     6H` 0  Flexible electrodes Body contours are often irregular Regularly shaped rigid electrodes may not always work. Special case : infants Material : - Polymer or nylon with silver - Carbon filled silicon rubber (Mylar film)bF--&-[-cc  H  0޽h ? ̙33f___PPT10i. `p+D=' N= @B +  0 V(  ~  s *T `}   R  C *AFig5-13Lq _  6,G_ ` 4___PPT10 B___PPT9$ HNeedle and wire electrodes for percutaneous measurement of biopotentials6IHgg@         0` z r&(a) Insulated needle electrode. (b) Coaxial needle electrode. (c) Bipolar coaxial electrode. (d) Fine-wire electrode connected to hypodermic needle, before being inserted. (e) Cross-sectional view of skin and muscle, showing coiled fine-wire electrode in place.' 2'c ' ~  <L& The latest: BION  implanted electrode for muscle recording/stimulation Alfred E. Mann Foundation bbg b H  0޽h ? ̙33f___PPT10i. ԏ+D=' = @B +  0 &(  ~  s *h_ `}  _ ^  c 6AFig5-14LH   6_ p @@___PPT10 ^___PPT9@8 2Electrodes for detecting fetal electrocardiogram during labor, by means of intracutaneous needles (a) Suction electrode. (b) Cross-sectional view of suction electrode in place, showing penetration of probe through epidermis. (c) Helical electrode, which is attached to fetal skin by corkscrew type action.b3Hggg g &L   H  0޽h ? ̙33f___PPT10i.`e<+D=' = @B +9  0 PH(  ~  s * 0     6 P 4___PPT10 B___PPT9$ Examples of microfabricated electrode arrays. 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B\ChDEF@,h\(@ @`P`   vBCfDE Fff @` - BB  3 x !    B\ChDEF@,h\(@ @`u n   vBCfDE Fff @`O= S BB  3  n    B\ChDEF@,h\(@ @`    vBCfDE Fff @` D BB  3      B\ChDEF@,h\(@ @`  t   vBCfDE Fff @`  BB  3 8 <   <pIAV g(c)40gc    <hM'  iTines40gc    <8S 6 hBase40gc    <0Wp.  o Exposed tip4 0 gc  BB  3 g      B$CDE8FB   $$    @`  lB B <Dg , lB B <Dg H lB B <Dg  fB  6DP @ fB  6DP  fB B 6D  P4 BB  3 d H  0޽h ? ̙33f___PPT10i.p+D=' = @B +~  0 %(  ~  s *b `}   ~  s *Pc    s *f`  Intracellular Extracellular" 2g&    H  0޽h ? ̙33f___PPT10i.+D=' = @B +)  0 @ 8   (  ~  s * `}   R  C *AFig5-17L?_   0 ~ Extracellular recording  typically in brain where you are interested in recording the firing of neurons (spikes). Use metal electrode+insulation -> goes to high impedance amplifier& negative capacitance amplifier!6gg   RB  s *DP  pRB  s *D@PP  <܉JJj XMicrons! g  t8     p  @  `    ` TB  c $D  TB   c $D ` N  `    `  TB  c $D  TB  c $D ` N  `     TB  c $D  TB  c $D ` LB  c $D00LB  c $DLB  c $D0LB  c $D00   <z v_  QR g    <P QC g  LB  c $DpRB  s *D RB @ s *D p RB  @ s *D p H  0޽h ? ̙33f___PPT10i.K+D=' = @B +O  0 f^(  ~  s * }   R  C *AFig5-18LG   0أ@` ~.(a) Metal inside glass (b) Glass inside metal / 2/g / H  0޽h ? ̙33f___PPT10i. Z+D=' = @B +F  0 ]Up (  ~  s * `   R  C *AFig5-19L,8   6  P 4___PPT10 B___PPT9$ A glass micropipet electrode filled with an electrolytic solution (a) Section of fine-bore glass capillary. (b) Capillary narrowed through heating and stretching. (c) Final structure of glass-pipet microelectrode. Lggg@      2  0xd P &Intracellular recording  typically for recording from cells, such as cardiac myocyte Need high impedance amplifier& negative capacitance amplifier!bg?g<gg&N  ? LB  c $D@@ @ `LB  c $D@0 0 `F      pN  `     ` TB  c $D  TB   c $D ` N  `    `  TB  c $D  TB  c $D ` N  `     TB  c $D  TB  c $D `   0P@ ` Vheat" 2g    0` Vpull" 2g    0 @  'Fill with intracellular fluid or 3M KCl"( 2(g&$   W  s *h0  wAg-AgCl wire+3M KCl has very low junction potential and hence very accurate for dc measurements (e.g. action potential)"x 2xg@     e H  0޽h ? ̙33f___PPT10i.pu+D=' = @B +y  0 ` y(  r  S  `}     RA elec:     RA circWp `   TA circ2` p `   0r_ p : 0Metal microelectrode with tip placed within cell 1 21g 1   0  eEquivalent circuits"(2g    0PP p fMetal Microelectrode" 2g  t  0   Use metal electrode+insulation -> goes to high impedance amplifier& negative capacitance amplifier! ccg c H  0޽h ? 3380___PPT10.y  0 QIP (    B  `}     TA elec2p    TA circ3! P   0 `  s!Glass Micropipette Microelectrode"" 2"g " H  0޽h ? 3380___PPT10.   0 @T(  r  S l `}   R  6P   Cannot be modeled as a series resistance and capacitance (there is no single useful model)  The body/electrode has a highly nonlinear response to stimulation  Large currents can cause  Cavitation  Cell damage  Heatingbggdggggggg&      0 PH@___PPT9" >Types of stimulating electrodes Pacing Ablation DefibrillationX  ggg ? 8X  < 0NP XFeatures g    0\ P Platinum electrodes: Applications: neural stimulation Modern day Pt-Ir and other exotic metal combinations to reduce polarization, improve conductance and long life/biocompatibility Steel electrodes for pacemakers and defibrillatorsL7gg4g&E   H  0޽h ? 33___PPT10i.Wm+D=' N= @B +  0 ` :(   x   c $ E0   X   0A+? @ > X   0A,?P @ X   0A-?* b   0 H  Reference : Lutz Hesse, Thomas Schanze, Marcus Wilms and Marcus Eger,  Implantation of retina stimulation electrodes and recording of electrical stimulation responses in the visual cortex of the cat , Graefe s Arch Clin Exp Ophthalmol (2000) 238:840 845"0 2c                   H   0޽h ? ̙33e 0  X(  X X s ZA103ԔFI retina implant Fig 1 . X s ZA203ԔFI retina implant Fig 2@ 7 X s ZA303ԔFI retina implant Fig 3 @` r X C JA=2FI retina implant Fig 4a` r X C JA52FI retina implant Fig 4b @ X 00``  {-In vivo neural microsystems (FIBE): challenge.0.b . H X 0޽h ? ̙33 0 <4@d(  d d s ^A:43ԔFI retina implant Fig 12a 7 d s ^A;43ԔFI retina implant Fig 12b P0 d s \A<23ԔFI retina implant Fig 13"b d 0U``  >In vivo neural microsystems (FIBE): biocompatibility - variant?0?b ? H d 0޽h ? ̙33 0  \.(  \ \ s ZA603ԔFI retina implant Fig 8/ \ s ZA703ԔFI retina implant Fig 9 ZD  \ 0L``  4In vivo neural microsystems (FIBE): state of the art505b 5 H \ 0޽h ? ̙33  0 R J P h(  hX2 h 0 R2 h s *2 h 0$sE  @0 @ h  BCDEF[K";0,:DJXfzgB *(DYr "u:pFjTdadgaq^{_lSH)W &.Mk  #"X<]}o Y^'-_RzvkvxVpW'#LnWB C jLuJ }_Ba5 `bH.3)~i[X\@                                          ` M  h 03 {0  bNeural microelectrodes0`   h 0pL  _MEMS - Microsystems0`   h 0p D o#Instrumentation for neurophysiology$0$` $   h 0XM L  aNeural Microsystems0`    h 0``  o!Introduction: neural microsystems"0"b " H h 0޽h ? ̙33 0 Ú`lS(  l͖F 0  l 0` l 0` l 0 ` l 0  l 60,$D 0 P 0`  ` l 0* ` l 0 * `  l 0 * `  l 00*   l 6* m ,$D  0 P 0`    l 6h*  m ,$D  0 P 0`  `  l 0 * m ` l 0* 0m  l 6Pm  ,$D  0 P 0`   l 6,m  ,$D 0 P 0`  ` l 0 m  ` l 0m 0  l s *  cExternal electrodes 0b   l s *  qSubdural electrodes 0b    l s *   `Micro-electrodes 0b   l s *P0 \ Microsensors 0 b   Vj l# ,$D  0`2 l 00`2 l 0P `2 l 0p Z2 l s *hZ2 l s *(X`2 l 0@p`2 l 0- <`2 l 0CZ`2  l 0RP`2 !l 0; 4`2 "l 0%U #l  BICDE@F G;$/A'E;IODe?}:/' @     !jq $lB  BICDE@F G;$/A'E;IODe?}:/' @     VdZ2 %l s * &l  BLCPDE(F 4PL= (oB!L @   ` 'l  B$C DE@F !  r U$ @       (l  BWCDE@F WP7* rd[ H 5 @     _ )l  BCDE@F v_K7 ~rZE0 @     ) *l  BCDE4F   tdyZTP&TE6  @    I%[ +l  BPCDE4F PF2gWsG5PB4 @    n ,l  BbCJDEXF(bJ`AZYXa&YQ:)xdMBv7=A$6 + @       iZ -l s *(`2 .l 0P@ /l B C0DEF0`000 @  Pp@j Vj 0l# ! ,$D  0`2 1l 00`2 2l 0P `2 3l 0p Z2 4l s *hZ2 5l s *(X 6l  BICDE@F G;$/A'E;IODe?}:/' @     !jq 7lB  BICDE@F G;$/A'E;IODe?}:/' @     Vd`2 8l 0P@ 9l  B*CDELF$ &:Nfv  *@      Fp7$ 0@b :l# M,$D  0 ;l S ZB"CDEFX::.s@Xfh;ib[WibFm#hZ`*8ZR0r` P` "B(HpB (0z8RH20B` "),@                   0@bT @ l < l2 ?l <P@l2 @l <@pl2 Al <p@T P@@ Bl# Z/l2 Cl <Pl2 Dl < l2 El <Pl2 Fl <l2 Gl <@@T P@@ Hl# ZaQl2 Il <Pl2 Jl < l2 Kl <Pl2 Ll <l2 Ml <@@T P@@ Nl# Zl2 Ol <Pl2 Pl < l2 Ql <Pl2 Rl <l2 Sl <@@T P@@ Tl# ZOl2 Ul <Pl2 Vl < l2 Wl <Pl2 Xl <l2 Yl <@@T P@@ Zl# ZoA1l2 [l <Pl2 \l < l2 ]l <Pl2 ^l <l2 _l <@@T P@@ `l# Z?l2 al <Pl2 bl < l2 cl <Pl2 dl <l2 el <@@`2 fl 0} 9nN R gl R hl # BCBDE(FԔ PB(4&*)4 @   R& il  BC2DEdF, |*[.:2&,%   rW.4@        BZ jl s *(  \ kl#   ,$D  0`2 ll 02`2 ml 0`2 nl 0PZ2 ol s *Z2 pl s *%A ql  BICDE@F G;$/A'E;IODe?}:/' @     r rlB  BICDE@F G;$/A'E;IODe?}:/' @     j;`2 sl 032`2 tl 07 ul # BCBDE(FԔ PB(4&*)4 @   D@& vl  BC7DEdF,  ~3]5<7&-%   rW.4@        G@Z wl s **\ xl C BsC DEF ) <Ohs@  !$f2 yl 6 3fB zlB 6D&jZ2 {l s *Yuj :  |l# Lf/,$D 0T X:r  }l# v:  ~l  B CDEFjFF e h7X>> &?Xg0o`wgo8w /XG7/ '/@// 8 w`     x O` /H ( 0 8 a    J    I   ou FW  } y u 24@                       `X:r T2 l c $fB l 6Do" l # BCDEXF(1#; ]  $+1"=?I]m}@       3'Z l s *Bj  Z  l# f ,$D 0T X:r  l#  vZ  l  B CDEFjFF e h7X>> &?Xg0o`wgo8w /XG7/ '/@// 8 w`     x O` /H ( 0 8 a    J    I   ou FW  } y u 24@                       `X:r T2 l c $fB l 6D1  " l # BCDEXF(1#; ]  $+1"=?I\m~@       S ' Z l s *  Bj  z  l# g fK,$D 0T X:r  l#  vz  l  B CDEFjFF e h7X>> &?Xg0o`wgo8w /XG7/ '/@// 8 w`     x O` /H ( 0 8 a    J    I   ou FW  } y u 24@                       `X:r T2 l c $fB l 6D1" l # BCDEXF(1#; ]  $+1"=?I\m~@       s 'Z l s *  Bj F  l# f,$D 0T X:r  l# Fv  l  B CDEFjFF e h7X>> &?Xg0o`wgo8w /XG7/ '/@// 8 w`     x O` /H ( 0 8 a    J    I   ou FW  } y u 24@                       `X:r T2 l c $fB l 6D1(" l # BCDEXF(1#; ]  $+1"=?I\m~@       'AZ l s *FBV  3 l#  y ,$D 0N @I l  3Z2 l s *@) `IN XI l XIV l  &B= CDE FB4ds{ [(F:jz!i~v@9|VkR9)    {eVG7,! %-5=GPYgkoikmpw~ "}8qSW^Gi7m(gaB 7,,% yk]XG6 &,2,9m}d\Td\T4,$/,)$ rVNFINSco&{8>D7>E]ky%.7;FQep{y\RHTI>yo cWI?54'ehk"%-5FHJ!E9-   !(/%034<8E<J=Q>X8a=fBkVp[r`tYm[r]w]gq   0 {@ kR O` 9n #v       \ I 6 6 (        d S B W S O D ; 2      2                  v h Y( J, E< -L r } o } S < % C < 5      H i v ] X %S 5h 2k 5n 8o 3k 5g 7T BP DL FP AP DP G? ]P Ya U ) ) ) Mt Yc eV oP tJ yS nP tM z? ; 7 7 5 3 0 , (     0 7 > 9) :6 ;E BV @g >t 1 + %  ! %   " 7} @` In R_ UP X4 P# R T Y d o          , < L U l      ) < : > B ?& A5 CD MP M\ Mi Cn As ?d @n Ax B S J A              & (           & / > D J J M P% W1 Y= [8 X1 Y* Z a b c b b b b b b c b a Y Yk Yc bS bC b0 Y Y Y ] e m x           $ A R c4 h> yH C M W m z    * > c o { z o d ? -t s h ] L A 6 2 #  s l g b a g m             r g \ q g ] < +     { i D 0  $ 1 Iaqha@j: Yx#<0xQjs@                                                                                                                                                                                                                                           PI2 l H7vy @XA H1 @0 2 l Zfvd @P )  l C NBC.DEF"g  .@`  J B  l# A O  ,$D  0VT  ^ 0  l# p B  l B CDEFT̙5%77&g6F&v7N7WwHPg'O7HfHN  B % b X N# ks    D j A s  . s b, "TjgP9(x'(@                   p 0 *Z  l3  ^   l B CDEFT̙5%77&g6F&v7N7WwHPg'O7HfHN  B % b X N# ks    D j A s  . s b, "TjgP9(x'(@                   l BC/DELF$̙5%/u?gX'H&(7Ingt@      +Z l BCGDE@F ̙5%h!/9&TQoe);?AG @     } l C NBC.DEF"g  .@`J  V  3 l# H  ,$D 0N @I l  3Z2 l s *@) `IN XI l XIV l  &B= CDE FB4ds{ [(F:jz!i~v@9|VkR9)    {eVG7,! %-5=GPYgkoikmpw~ "}8qSW^Gi7m(gaB 7,,% yk]XG6 &,2,9m}d\Td\T4,$/,)$ rVNFINSco&{8>D7>E]ky%.7;FQep{y\RHTI>yo cWI?54'ehk"%-5FHJ!E9-   !(/%034<8E<J=Q>X8a=fBkVp[r`tYm[r]w]gq   0 {@ kR O` 9n #v       \ I 6 6 (        d S B W S O D ; 2      2                  v h Y( J, E< -L r } o } S < % C < 5      H i v ] X %S 5h 2k 5n 8o 3k 5g 7T BP DL FP AP DP G? ]P Ya U ) ) ) Mt Yc eV oP tJ yS nP tM z? ; 7 7 5 3 0 , (     0 7 > 9) :6 ;E BV @g >t 1 + %  ! %   " 7} @` In R_ UP X4 P# R T Y d o          , < L U l      ) < : > B ?& A5 CD MP M\ Mi Cn As ?d @n Ax B S J A              & (           & / > D J J M P% W1 Y= [8 X1 Y* Z a b c b b b b b b c b a Y Yk Yc bS bC b0 Y Y Y ] e m x           $ A R c4 h> yH C M W m z    * > c o { z o d ? -t s h ] L A 6 2 #  s l g b a g m             r g \ q g ] < +     { i D 0  $ 1 Iaqha@j: Yx#<0xQjs@                                                                                                                                                                                                                                           PI2 l H?vy @XA H1 @0 2 l Zfvd @P )  l C NBC.DEF"fg  .@`  0D B  l# I V ,$D  0VT  ^ 0  l# 0p B  l B CDEFT̙5%77&g6F&v7N7WwHPg'O7HfHN  B % b X N# ks    D j A s  . s b, "TjgP9(x'(@                   p 0 *Z  l3  ^   l B CDEFT̙5%77&g6F&v7N7WwHPg'O7HfHN  B % b X N# ks    D j A s  . s b, "TjgP9(x'(@                   l BC/DELF$̙5%/u?gX'H&(7Ingt@      +Z l BCGDE@F ̙5%h!/9&TQoe);?AG @     } l C NBC.DEF"fg  .@`D   l s *D k Human level0 0bb   l s *H*  l Animal level0 0bb   l s *xO* m  rTissue slice level00b b   l s *Pm   nCellular level00bb  ` l 00` l 0*  m ` l 0* m ` l 0m  ` l 0m   l 0Z``  7Introduction: types of neural microsystems applications808b 8 ^ l 631R ^ l 631   l 0_R bIn vivo applications0`   l 0La f  cIn vitro applications0`  H l 0޽h ? 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BC#DEXF`>//699r9,,/16kkbX!N#B#3#%-0@ Bte " BKC'DEFK'K`K' @` | H  # B|CADEF1||&KA @ _ y <B $ # H# y@  % BCDEF&8)z.'8@`L   & |BiCDEF*i @z  <B ' # L z* <B ( # s   ) BCDEF&8)z.)8@`   * |BlCDEF*l @G  <B + #  G* <B , # B q  - BCDEF&8)z.)8@`   . |BlCDEF*l @G  <B / #  G <B 0 # Bc q{  1 BCDEF&9)z/)9@` *  2 |BkCDEF)k @   <B 3 #  6 G <B 4 #   5 BCDEF )8)z. @ *  6 |BkCDEF)k @  <B 7 #   * <B 8 #   9 BCDEFXE @` '! <B :B #  <B ; #   S <B < #   <B = #  ," <B > # T ? 6p{e]  p Bonding pads4 0 gc   @ 6l}J ~ Si substrate4 0 gc    A 6p  p Exposed tips4 0 gc   B 6dE  lLead via4 0gc   C 6\; A  lChannels4 0gc   D 642G   m Electrode4 0 gc   E 6̘8Y  q Silicon probe40 gc   F 6 = H  p Silicon chip4 0 gc   G 6H!C   pMiniature insulating chamber$0g   H 6TT  fContact metal film$0g   I 6A a  hHole40gc   J 6t@[b 5 SiO2 insulated Au probesN0gog   K 6xw q Silicon probe40 gc   L 6 2  fExposed electrodes$0g   M 6$ Hr " Insulated lead vias$0g&    N 6 U  g(b)40gc   O 6H  g(d)40gc   P 6h g(a)40gc   Q 6   g(c)40gc    R BC/DE8FB % %#%%//' % % @`V  S BC,DE8FB ' ''** ,,* ' ' @`N g   T B,C"DE8FB"""", , '"" @`Fh  U B#C,DE8FB #,#,   @` ) J V B)C DEXFb"') ''$   .0@` q J W B*C DEXFb"'* ''%   .0@`h  J X B(C DEXFb %( ((#     .0@` D J Y B*CDEXFb#'* ''#  .0@`  (J Z B'C DEXFb %' ''"    .0@`t A a  [ B C,DE8FB  , ,   @` 3   \ B$C)DE8FB   $$))    @`  ] B%C+DE8FB %+%+   @`l    ^ BC,DE8FB  ,,  @` (   _ BC.DE8FB ' '')) ..) ' ' @`q    ` BC,DE8FB  ,,    @`] ( v T   a B,CDE8FB   ,,   @` G _   b B,CDE8FB  ,,   @`  c BaCDE F*-l9[aa-@`Ti^ d tBaCDE Fa@T< e tB;C?DE F;?@_O<B f # !C g BaCDE F*.l9[aa.@`}  h tBaCDE Fa@#}  i tB;C?DE F;?@' b <B j #   k BC,DE8FB   , ,   @`O{ l tBC{DE F{@B  m B"C)DE8FB   " " ))    @` n 68 `4___PPT10 B___PPT9$ TDifferent types of microelectrodes fabricated using microfabrication/MEMS technology4UTgg&4    o 6@ `  wBeam-lead multiple electrode.*cc   p Bp D  tMultielectrode silicon probec   q B0@  dMultiple-chamber electrodec   r Bp@ D dPeripheral-nerve electrodec  H  0޽h ? ̙33f___PPT10i.p=+D=' = @B +  0 ~P(  x  c $0`   ^  C 6A*michiganprobesH  0޽h ? ̙33  0 p$G(  $x $ c $    X $ 0A.? / $ 6\N@H _Reference : http://www.acreo.se/acreo-rd/IMAGES/PUBLICATIONS/PROCEEDINGS/ABSTRACT-KINDLUNDH.PDF `0`c&  S  H $ 0޽h ? ̙33u 0 %0`(  ` ` 0 N``  u'In vivo neural microsystems: 3 examples(0(b ( " ` 0\N@  University of Michigan Smart comb-shape microelectrode arrays for brain stimulation and recording University of Illinois at Urbana-Champaign High-density comb-shape metal microelectrode arrays for recording Fraunhofer Institute of Biomedical (FIBE) Engineering Retina implant ^0bN`+bE`6b`&   < x ` <A8 0?3?r 0r ` c JA9&3Uni Ill MEA Fig 4a0pD | ` c TA603FI retina implant Fig 8 p\H ` 0޽h ? ̙33  0 f^ ((  (x ( c $pNP  N X ( C 0A/microw%7E1 0 ( B NJ n BReference : http://www.nottingham.ac.uk/neuronal-networks/mmep.htm C0Cc&  6  R ( s * hN ( C &A0 array  L   (#  H ( C  N  ( S    ( 0%NP   :Reference : http://www.cyberkineticsinc.com/technology.htm";0 2;c& '  H ( 0޽h ? ̙33  0 vn@(  ~  s *,N `}  N H  C A)wpi H  0޽h ? ̙33: 0  z(    01NP0 gNitric Oxide Sensor$0 2c,  j  08NpP   Developed at Dr.Thakor s Lab, BME, JHU Electrochemical detection of NO$I1 2Ic2     0 F hb   @py  0_ hb  Left: Schematic of the 16-electrode sensor array. Right: Close-up of a single site. The underlying metal is Au and appears reddish under the photoresist. The dark layer is C (300m-x-300m)$0 a  r  BA pic61 hl  <A̙?< l  <8cP0`B   0D8cP `B   0D8cP+ H  0޽h ? ̙33t   0 $    (  B  # A"=    C DQN  Cartoon of the fabrication sequence for the NO sensor array A) Bare 4 Si wafer B) 5m of photoresist was spin-coated on to the surface, followed by a pre-bake for 1min at 90C. C) The samples were then exposed through a mask for 16s using UV light at 365nm and an intensity of 15mW/cm2. D) Patterned photoresist after development. E) 20nm of Ti, 150nm of Au and 50nm of C were evaporated on. F) The metal on the unexposed areas was removed by incubation in an acetone bath. G)A 2nd layer of photoresist, which serves as the insulation layer, was spun on and patterned. 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